8.1.6 - Unveiling Humidity-Enhanced Performance in Chemoresistive CoCu₂O₃ VOCs Sensors
- Event
- EUROSENSORS 2026
2026-09-06 - 2026-09-09
Zurich - Band
- Lectures
- Chapter
- Chemical Sensors
- Author(s)
- M. D’Andria, H. Shin, A. T. Güntner - ETH Zurich,Zurich (Switzerland), Y. -H. Wu - Forschungszentrum Jülich GmbH,Erlangen (Germany), X. Meng, F. R. Wang - University College London (UCL),London (United Kingdom), P. Zeller - Fritz-Haber-Institut der Max-Planck-Gesellschaft,Berlin (Germany)
- Pages
- 254 - 255
- DOI
- 10.5162/eurosensors2026/8.1.6
- ISBN
- 978-3-910600-12-6
- Price
- free
Abstract
We report on our next generation high-volume manufacturing (HVM) process platform for high performance inertial-measurement unit (IMU) devices. While footprint is reduced, it achieves a 40% increase in sensitivity for gyroscope and accelerometer with reduced noise level and improved vibration robustness. New process modules have been implemented and combined to accomplish stable production and application requirements.