B2.1 - Demonstration of gas detection based on MEMS suspended cantilever and on-chip optical read-out
- AMA Conferences 2015
2015-05-19 - 2015-05-21
- Proceedings SENSOR 2015
- B2 - MEMS & NEMS
- M. Zawierta, G. Putrino, M. Martyniuk, K. Dilusha Silva, L. Faraone, A. Keating, R. Woodward, J. Dell - The University of Western Australia, Crawley, WA (Australia), M. Myers - Hydrocarbon Detection Team, CSIRO (Australia), R. Jeffery - Panorama Synergy Ltd (Australia)
- 212 - 215
We demonstrate a toluene sensor based on the combination of integrated silicon photonics and microelectromechanical systems (MEMS). An integrated silicon photonics approach was used to create an optically resonant microcavity for monitoring the position of a cantilever. The demonstrated integrated cantilever read-out technology has the potential to provide physically robust chemical or biological sensors with picometer resolution for real world applications.