B2.4 - Lithographically defined nickel wires for gasflow sensing applications
- AMA Conferences 2015
2015-05-19 - 2015-05-21
- Proceedings SENSOR 2015
- B2 - MEMS & NEMS
- S. Quednau, H. Schlaak - Technische Universität Darmstadt (Germany)
- 222 - 227
This work introduces a process for a fabrication of freely suspended nickel wires with at laest on dimension smaller than one micron. The wires are fabricated by photolithography with subsequent electrodeposition. They are used as temperature sensing elements in a calorimetric gas flow sensor and have a high potential of reducing the response time of such devices. A fabricated sensor element was placed in a gas flow channel to carry out a steady state characterization and to prove its functionality. The thermal coefficient of electrical resistance was determined by measurements in a climate chamber. Additionally we carried out a CFD calculation in order to determine the optimal sensor element design.