C1.1 - Comparison of Polyimide to Silicon Nitride Membranes for Robust Thermal Flow Sensors
- Event
- SMSI 2025
2025-05-06 - 2025-05-08
Nürnberg - Band
- Lectures
- Chapter
- C1 - Flow Sensing
- Author(s)
- T. Trautmann, A. Schander, M. Vellekoop - University of Bremen, Bremen (Germany)
- Pages
- 125 - 126
- DOI
- 10.5162/SMSI2025/C1.1
- ISBN
- 978-3-910600-06-5
- Price
- free
Abstract
This work compares thin and robust polyimide membranes for thermal flow sensors to flow sensors based on silicon nitride membranes. Due to the low thermal conductivity of polyimide, the sensitivity measurements are showing only a small reduction in sensitivity of less than 20% when a polyimide membrane with a ten times higher thickness compared to a silicon nitride membrane is used. At the same time the polyimide membrane can withstand a 50% higher pressure difference which leads to a significant improvement of the robustness.