| SMSI 2025 |
D6.1 - High Throughput Magnetron Sputtering of Tilted c-Axis AlN Films for Biosensing Applications |
P. Bergmann, E. Loos, M. Nestler - scia Systems GmbH, Chemnitz (Germany) |
| SMSI 2025 |
D6.2 - Noise in Piezoelectric MEMS: Modeling and Experimental Characterization |
S. Zarepakzad, P. Egger, N. Haghighi, S. Muringakodan, M. Mortada, P. Das, U. Schmid, M. Schneider - TU Wien, Vienna (Austria), K. Schwab - Kavli Nanoscience Institute and Thomas J. Watson Sr., California (USA) |
| SMSI 2025 |
D6.3 - DC Voltage Induced Parametric Potential Energy Modulation in Bistable Piezoelectric MEMS Membranes |
S. Muringakodan, U. Schmid, M. Schneider - TU Wien, Vienna (Austria) |
| SMSI 2025 |
D6.4 - Characterization of AlN-Based MEMS Kineto-Electric Transducer for Cultural Heritage Conservation |
C. Trigona, S. Ahmed, A. Gueli, S. Baglio - University of Catania, Catania (Italy), M. Liuzzo, F. Iacono, G. Navarra - University of Enna “Kore”, Enna (Italy) |