| SMSI 2025 |
B3.1 - High-Sensitive Chromium Strain Gauges on Steel Surfaces |
R. Ottermann, T. Steppeler, M. Wurz - Leibniz University Hannover, Garbsen (Germany) |
| SMSI 2025 |
B3.2 - Analysis of positioning parameters at glazing of pressure measurement cells |
I. Jenei, R. Wagner, M. Nikolic - ETO SENSORIC GmbH, Nürnberg (Germany), A. Grün - CiS Forschungsinstitut für Mikrosensorik GmbH, Erfurt (Germany) |
| SMSI 2025 |
B3.3 - Advanced Glass Packaging with Integrated Stress Relief Structures for MEMS Pressure Sensors |
M. Bertke, S. Schudak - LPKF Laser & Electronics SE, Garbsen (Germany) |
| SMSI 2025 |
B3.4 - Sensors on PEEK - Advantages of Plastic Substrates in Microsystem and MEMS Technology |
S. Bengsch, E. Fischer, S. Bur - Ensinger GmbH, Nufringen (Germany) |