| SMSI 2025 |
B2.1 - Structural Investigations of Pore Nucleation after Electrochemical Porosification of 4H-SiC for MEMS |
G. Pfusterschmied, C. Zellner, D. Schock, U. Schmid - TU Wien, Vienna (Austria) |
| SMSI 2025 |
B2.2 - Avoided mode-crossing in MEMS resonators under different dissipation mechanisms |
A. Loch Gesing, E. Gietl, M. Stixenberger, D. Platz, U. Schmid - TU Wien, Vienna (Austria) |
| SMSI 2025 |
B2.3 - Simultaneous Analysis of Local Device Layer Thickness and Film Stress on Cantilevered MEMS Structures |
D. Huber, C. Schallert, G. Pfusterschmied, U. Schmid - TU Wien, Vienna (Austria) |
| SMSI 2025 |
B2.4 - Nanoelectromechanical System Fourier Transform Infrared Spectroscopy (NEMS-FTIR) for Nanoplastic and Polymer Degradation Analysis |
J. Timarac-Popovic, A. Giesriegl, H. Besic, S. Schmid - TU Wien, Vienna (Austria), J. Hiesberger, N. Luhmann, J. Lafleur - Invisible-Light Labs GmbH, Vienna (Austria) |