P17 - Influence of Length on the Electromigration of Aluminum through Molybdenum disilicide Thin films
- Event
- SMSI 2025
2025-05-06 - 2025-05-08
Nürnberg - Band
- Poster
- Chapter
- Poster Session
- Author(s)
- J. Baldauf, A. Winzer, T. Ortlepp - CiS Forschungsinstitut für Mikrosensorik GmbH, Erfurt (Germany)
- Pages
- 265 - 266
- DOI
- 10.5162/SMSI2025/P17
- ISBN
- 978-3-910600-06-5
- Price
- free
Abstract
The effect of the length of the test structure on the electromigration of aluminum in encapsulated mo-lybdenum disilicide layers has been investigated. Using the same measurement conditions an in-crease of the electromigrated volume of aluminum through the test structure with an increase of the length of the test structure could be observed.