P38 - Fabrication and Characterization of CO2 Sensor Using ZnO<In> Nanograins
- Event
- SMSI 2025
2025-05-06 - 2025-05-08
Nürnberg - Band
- Poster
- Chapter
- Poster Session
- Author(s)
- M. Aleksanyan, G. Shahkhatuni, Z. Simonyan, G. Shahnazaryan, R. Papovyan, D. Kananov, A. Grigoryan, G. Gevorgyan, G. Stepanyan, A. Sayunts - Yerevan State University, Yerevan (Armenia)
- Pages
- 307 - 308
- DOI
- 10.5162/SMSI2025/P38
- ISBN
- 978-3-910600-06-5
- Price
- free
Abstract
This work presents the development of a CO2 gas sensor based on ZnO+0.5 at.% In2O3. The sensor, with a thickness of 40 nm, was prepared using the high-frequency magnetron sputtering method. The produced thin film exhibited excellent gas sensing characteristics towards CO2 at an operating temper-ature of 265°C. In the presence of 5000 ppm of CO2, the sensor demonstrated a decrease in resistance of approximately 2.3 times, indicating a linear dependence of the sensor response on gas concentration.