P31 - In-Situ and Operando Measurements for the Characterization of Next-Generation Sensor Materials

Event
SMSI 2025
2025-05-06 - 2025-05-08
Nürnberg
Band
Poster
Chapter
Poster Session
Author(s)
R. Tschammer, D. Guttmann, C. Morales, K. Henkel, J. Flege - BTU Cottbus-Senftenberg, Cottbus (Germany), C. Tiebe - Bundesanstalt für Materialforschung und -prüfung, Berlin (Germany)
Pages
292 - 293
DOI
10.5162/SMSI2025/P31
ISBN
978-3-910600-06-5
Price
free

Abstract

In this contribution, we highlight the use of in-situ X-ray photoelectron spectroscopy and operando spectroscopic ellipsometry for the characterization of ultra-thin (<20nm) atomic layer deposited layers for the use in next-generation miniaturized sensor devices. By targeting tin oxide layers, we show how we can use these techniques to gain insights into material composition, thickness, and optical properties, thus paving the way for unraveling the correlations between material properties and sensing performance.

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