P25 - Membrane Characterization of Transparent Photodiodes
- Event
- SMSI 2025
2025-05-06 - 2025-05-08
Nürnberg - Band
- Poster
- Chapter
- Poster Session
- Author(s)
- C. Möller, D. Mitrenga, T. Klein, A. Winzer, T. Ortlepp - CiS Forschungsinstitut für Mikrosensorik GmbH, Erfurt (Germany)
- Pages
- 280 - 281
- DOI
- 10.5162/SMSI2025/P25
- ISBN
- 978-3-910600-06-5
- Price
- free
Abstract
The paper reports the design, technology and mechanical and optical measurements on a transparent photodetector. We prepared different box layer thicknesses (500 nm, 250 nm, and 20 nm) and investi-gate the resulting membrane bow. OBIC measurements show the location-dependent photocurrent dis-tribution on the membrane.