P33 - A MEMS-SPM for dynamic nanomechanical measurements of soft materials
- Event
- SMSI 2025
2025-05-06 - 2025-05-08
Nürnberg - Band
- Poster
- Chapter
- Poster Session
- Author(s)
- U. Brand, Z. Li - Physikalisch-Technische Bundesanstalt, Braunschweig (Germany)
- Pages
- 296 - 297
- DOI
- 10.5162/SMSI2025/P33
- ISBN
- 978-3-910600-06-5
- Price
- free
Abstract
High throughput nanomechanical characterization of soft materials including biomaterials demands further development of advanced nanomechanical measurement systems. A microelectromechanical system based scanning probe microscope (MEMS-SPM) for nanomaterial testing has been developed to bridge the metrological gap between typical nanoindentation instruments and nanomechanical AFMs. Proof-of-principle measurements of typical reference materials including PC with a bandwidth up to 20 kHz have been reported to validate the advanced measurement capability of the MEMS-SPM.