P34 - Point Cloud Data Processing in Scanning Probe Microscopy

Event
SMSI 2025
2025-05-06 - 2025-05-08
Nürnberg
Band
Poster
Chapter
Poster Session
Author(s)
P. Klapetek, M. Valtr - Czech Metrology Institute, Brno (Czech Republic), D. Necas - CEITEC Brno University of Technology, Brno (Czech Republic), E. Heaps, A. Yacoot - National Physical Laboratory, Teddington (United Kingdom)
Pages
298 - 299
DOI
10.5162/SMSI2025/P34
ISBN
978-3-910600-06-5
Price
free

Abstract

This work describes the methods for processing general XYZ data clouds which are the primary data coming from metrological Scanning Probe Microscopes (SPM).They can also be obtained also with other SPM instrumentation. XYZ data are more general than the normal raster scan data, typically used in SPM. The transition from raster data to point clouds allows much more complex scanning patterns to be used easily and makes the SPM sampling closer to that used in other 3D measurements systems such as coordinate measuring machines. The with all the benefits and drawback of this approach for scanning probe microscopes are discussed.

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