P18 - Changes in Amorphous Molybdenum Disilicide Thin Films Caused by Electrical Current Stressing
- Event
- SMSI 2025
2025-05-06 - 2025-05-08
Nürnberg - Band
- Poster
- Chapter
- Poster Session
- Author(s)
- J. Baldauf, S. Reiß, A. Winzer, T. Ortlepp - CiS Forschungsinstitut für Mikrosensorik GmbH, Erfurt (Germany)
- Pages
- 267 - 268
- DOI
- 10.5162/SMSI2025/P18
- ISBN
- 978-3-910600-06-5
- Price
- free
Abstract
We investigated the influence of electrical current on amorphous molybdenum disilicide layers. In our experiments we observed that current stressing causes a change of the layer composition of lines and aluminum electromigration from the contact pads into the top of the test structure.