P18 - Changes in Amorphous Molybdenum Disilicide Thin Films Caused by Electrical Current Stressing

Event
SMSI 2025
2025-05-06 - 2025-05-08
Nürnberg
Band
Poster
Chapter
Poster Session
Author(s)
J. Baldauf, S. Reiß, A. Winzer, T. Ortlepp - CiS Forschungsinstitut für Mikrosensorik GmbH, Erfurt (Germany)
Pages
267 - 268
DOI
10.5162/SMSI2025/P18
ISBN
978-3-910600-06-5
Price
free

Abstract

We investigated the influence of electrical current on amorphous molybdenum disilicide layers. In our experiments we observed that current stressing causes a change of the layer composition of lines and aluminum electromigration from the contact pads into the top of the test structure.

Download