C5.1 - Programmable Printing Technology Based on Spark Ablation for the Development of Gas Sensors
- Event
- SMSI 2025
2025-05-06 - 2025-05-08
Nürnberg - Band
- Lectures
- Chapter
- C5 - Gas Sensing II
- Author(s)
- L. Sacco, N. Rising, N. Schouten - VSParticle, Delft (The Netherlands), L. Egger, M. Popov, A. Köck - Materials Center Leoben Forschung GmbH, Leoben (Austria), C. Dösinger, L. Romaner - Montanuniversität Leoben, Leoben (Austria)
- Pages
- 157 - 158
- DOI
- 10.5162/SMSI2025/C5.1
- ISBN
- 978-3-910600-06-5
- Price
- free
Abstract
Herein, a manufacturing method is presented capable to screen multiple materials on a platform chip hosting 16 devices. This methodology relies on a dry printing process based on spark ablation that enable the deposition of nanoporous layers (NPLs). Different metal oxides semiconductors (MOS) com-positions in form of NPLs were printed and tested as a gas sensors upon formaldehyde exposure. The focus of this work is not only on the sensing performance but also in the methods to accelerate the sensing layer production of single sensing units or an array of chemical sensors.