C5.3 - Optomechanical Gas Pressure Sensing over Broad Pressure and Temperature Ranges
- Event
- SMSI 2025
2025-05-06 - 2025-05-08
Nürnberg - Band
- Lectures
- Chapter
- C5 - Gas Sensing II
- Author(s)
- C. Reinhardt, S. Croatto, L. Stankewitz, M. Kunze, J. Schaffran, A. Lindner - Deutsches Elektronen-Synchrotron DESY, Hamburg (Germany), H. Masalehdan, A. Franke, N. Sültmann, R. Schnabel - University of Hamburg, Hamburg (Germany)
- Pages
- 161 - 162
- DOI
- 10.5162/SMSI2025/C5.3
- ISBN
- 978-3-910600-06-5
- Price
- free
Abstract
This paper presents novel optomechanical gas pressure sensors featuring a chip-scale mechanical resonator with ultra-low intrinsic loss, read out via an optical interferometer. In a recent experiment using a free-space optical Michelson interferometer, we demonstrated a single sensor with an unprecedented 10-decade measurement range from 10−7 to 103 mbar. After providing a brief overview of our ongoing efforts to extend this range further towards lower pressures, we present developments of a compact, portable version of the sensor, using an optical fiber-based readout. We demonstrate this sensor’s functionality over a broad temperature range from 77 K to 300 K.