D3.2 - Fast MEMS-IR-Emitters for NDIR Sensors
- Event
- SMSI 2025
2025-05-06 - 2025-05-08
Nürnberg - Band
- Lectures
- Chapter
- D3 - IR and Temperature Measurement
- Author(s)
- T. Schildhauer, A. Winzer, J. Baldauf, T. Ortlepp - CiS Forschungsinstitut für Mikrosensorik GmbH, Erfurt (Germany)
- Pages
- 198 - 199
- DOI
- 10.5162/SMSI2025/D3.2
- ISBN
- 978-3-910600-06-5
- Price
- free
Abstract
Infrared emitters based on MEMS technology are ideal for miniaturizing NDIR spectrometers. However, commercial MEMS-IR emitters typically reach their operational limit at measurement frequencies around 20 Hz, while certain applications, require frequencies up to 100 Hz. To meet this demand, we have advanced our MEMS-IR emitters by optimizing both chip architecture and assembly techniques for high-speed NDIR spectroscopy. These enhanced IR sources enable gas analysis in the 2-20 μm wavelength range at pulse frequencies up to 100 Hz.