D5.2 - Evaluation of piezoelectric micromachined ultrasonic transducers (PMUT) for the broadband detection of ultrasonic elastic waves
- Event
- SMSI 2025
2025-05-06 - 2025-05-08
Nürnberg - Band
- Lectures
- Chapter
- D5 - Piezoelectric MEMS I
- Author(s)
- H. Zeipert, L. Claes, B. Henning - Paderborn University, Paderborn (Germany), C. Stoeckel, S. Mulay - Fraunhofer ENAS, Chemnitz (Germany)
- Pages
- 214 - 215
- DOI
- 10.5162/SMSI2025/D5.2
- ISBN
- 978-3-910600-06-5
- Price
- free
Abstract
Elastic waves in solids are frequently used for material characterisation or non destructive testing methods. For the detection of elastic waves with high sensitivity piezoelectric transducers are commonly used. This investigation compares the performance of a piezoceramic based ultrasonic transducer and a piezoelectric micromachined ultrasonic transducer (PMUT) for the detection of broadband acoustic waves in the spatial and temporal regime.