D5.3 - Experimental comparison of receive sensitivity of circular and ring piezo-electrodes geometries for PMUT resonator membranes designed in PiezoMUMPS process
- Event
- SMSI 2025
2025-05-06 - 2025-05-08
Nürnberg - Band
- Lectures
- Chapter
- D5 - Piezoelectric MEMS I
- Author(s)
- N. Plantak, M. Katalenic, D. Oletic - University of Zagreb, Zagreb (Croatia)
- Pages
- 216 - 217
- DOI
- 10.5162/SMSI2025/D5.3
- ISBN
- 978-3-910600-06-5
- Price
- free
Abstract
Piezoelectric micromachined ultrasonic transducers (PMUT) elements in SOI technologies based on circular resonator membranes, often employ fully covered circular, or ring-shaped piezo-electrodes. However, depending on the exact piezo material stack, their placement and geometry may introduce mechanical clamping or residual stress, causing a loss of sensitivity, or unwanted resonant frequency shifts. Here we show early FEM and experimental results of geometric optimization of circular, and ring piezo-electrodes for 1 MHz PMUT resonator membranes designed in PiezoMUMPS process.