Available documents

Event Title Author(s)
SMSI 2021 A4.1 A Metrological Atomic Force Microscope for Large Range Measurements with Sub-nanometre Resolution Y. Wu, E. Wirthmann, U. Klöpzig, T. Hausotte - Friedrich-Alexander-Universität Erlangen-Nürnberg, Erlangen (Germany)
SMSI 2021 A4.2 Development of a Non-invasive Pressure Sensor P. Szász, V. Migunov - ABB Corporate Research Center, Ladenburg (Germany)
SMSI 2021 A4.4 Theoretical Analysis of Measurement Flexures at the 5 MN m Torque Standard Machine at PTB K. Geva, H. Kahmann, C. Schlegel, R. Kumme - Physikalisch-Technische Bundesanstalt, Braunschweig (Germany)
SMSI 2021 A5.1 Design, Simulation, Fabrication and Characterization of Piezoelectric MEMS Cantilever for Gas Density and Viscosity Sensors Applications A. Mehdaoui, C. Huber, J. Becker, F. Schraner - TrueDyne Sensors AG, Reinach (Switzerland), L. Villanueva - Ecole Polytechnique Fédérale de Lausanne, Lausanne (Switzerland)
SMSI 2021 A5.2 Swarm-Based Multi-Objective Design Optimization of Single-Plate Condenser MEMS Microphone Q. Zaman, S. Alraho, A. König - TU Kaiserslautern, Kaiserslautern (Germany)
SMSI 2021 A5.3 Designing Low Power Systems with Digital MEMS Sensors P. Stukjunger - STMicroelectronics, Prague (Czech Republic)
SMSI 2021 A5.4 Self-excited Contact Resonance Operation of a Tactile Piezoresistive Cantilever Microprobe with Diamond Tip M. Fahrbach, E. Peiner - Technische Universität Braunschweig, Braunschweig (Germany), M. Xu, U. Brand - Physikalisch-Technische Bundesanstalt, Braunschweig (Germany)
SMSI 2021 A6.1 Full Stress Tensor Measurement by Photoelasticity in Silicon M. Stoehr, S. Schoenfelder - University of Applied Sciences Leipzig, Leipzig (Germany), G. Gerlach - Technische Universität Dresden, Dresden (Germany), T. Härtling - Fraunhofer Institute IKTS, Dresden (Germany)
SMSI 2021 A6.2 Adding Seebeck Coefficient Measurements to an Existing High Temperature Device for Hall Constant and Electrical Conductivity Measurements R. Werner, J. Kita, R. Moos - University Bayreuth, Bayreuth (Germany), M. Gollner, F. Linseis - Linseis Thermal Analysis, Selb (Germany)
SMSI 2021 A6.3 Epitaxial Graphene on SiC: A Versatile Sensing Platform for High Sensitivity Applications M. Rodner - Saarland University, Saarbrücken (Germany), D. Puglisi, A. Zilli, J. Eriksson - Linköping University, Linköping (Sweden)