B2.1 - Structural Investigations of Pore Nucleation after Electrochemical Porosification of 4H-SiC for MEMS
- Event
- SMSI 2025
2025-05-06 - 2025-05-08
Nürnberg - Band
- Lectures
- Chapter
- B2 - MEMS Resonators
- Author(s)
- G. Pfusterschmied, C. Zellner, D. Schock, U. Schmid - TU Wien, Vienna (Austria)
- Pages
- 81 - 82
- DOI
- 10.5162/SMSI2025/B2.1
- ISBN
- 978-3-910600-06-5
- Price
- free
Abstract
The study emphasises the advantages of using electrochemical porosification to fabricate SiC-based MEMS devices, specifically focusing on improving pore nucleation control while preserving surface integrity. The results indicate that surface roughness plays a crucial role in pore nucleation, demonstrating the potential for improved MEMS device performance through carefully controlled substrate and etching conditions.