B2.2 - Avoided mode-crossing in MEMS resonators under different dissipation mechanisms
- Event
- SMSI 2025
2025-05-06 - 2025-05-08
Nürnberg - Band
- Lectures
- Chapter
- B2 - MEMS Resonators
- Author(s)
- A. Loch Gesing, E. Gietl, M. Stixenberger, D. Platz, U. Schmid - TU Wien, Vienna (Austria)
- Pages
- 83 - 84
- DOI
- 10.5162/SMSI2025/B2.2
- ISBN
- 978-3-910600-06-5
- Price
- free
Abstract
This study investigates the phenomenon of avoided-crossing in MEMS resonators and its impact on the quality factor (Q-factor) under two key dissipation mechanisms: anchor losses and fluid-structure interaction. Numerical and experimental results reveal significant reductions in Q-factors during mode crossings and avoidedcrossings, particularly in scenarios involving width variations and fluid density changes. These findings highlight the need to consider avoided mode-crossing in MEMS resonators for obtaining high Q-factors and hence, high device sensitivity as well as predictable bandwidth.