B3.2 - Analysis of positioning parameters at glazing of pressure measurement cells
- Event
- SMSI 2025
2025-05-06 - 2025-05-08
Nürnberg - Band
- Lectures
- Chapter
- B3 - Pressure Sensors and their Applications
- Author(s)
- I. Jenei, R. Wagner, M. Nikolic - ETO SENSORIC GmbH, Nürnberg (Germany), A. Grün - CiS Forschungsinstitut für Mikrosensorik GmbH, Erfurt (Germany)
- Pages
- 91 - 92
- DOI
- 10.5162/SMSI2025/B3.2
- ISBN
- 978-3-910600-06-5
- Price
- free
Abstract
Glazing is increasingly used to join the silicon measuring cell to the steel diaphragm in pressure sensor production. This study examines the glazing process at ETO SENSORIC (Germany) using statistical analysis. The objective was to identify key positioning parameters that optimize signal yield. High sensor sensitivity and low deviation of the characteristic curve are maintained. A multivariable regression was performed with the measuring cell signal as the response. The analysis was extended with a μCT study of parts with unexplained signal deviations.