B3.4 - Sensors on PEEK - Advantages of Plastic Substrates in Microsystem and MEMS Technology
- Event
- SMSI 2025
2025-05-06 - 2025-05-08
Nürnberg - Band
- Lectures
- Chapter
- B3 - Pressure Sensors and their Applications
- Author(s)
- S. Bengsch, E. Fischer, S. Bur - Ensinger GmbH, Nufringen (Germany)
- Pages
- 95 - 96
- DOI
- 10.5162/SMSI2025/B3.4
- ISBN
- 978-3-910600-06-5
- Price
- free
Abstract
Silicon, glass and ceramic substrates are generally used in the field of microsystems technology and MEMS. Thermoplastics play a subordinate role at most in the area of flexible substrates. However, substrates made of polyether ether ketone (PEEK) offer previously unimagined advantages for new sensor application scenarios where conventional substrates reach their limits. Especially the Ensinger Microsystems Technology (EMST) shows the various benefits using PEEK as a substrate material.