D6.2 - Noise in Piezoelectric MEMS: Modeling and Experimental Characterization
- Event
- SMSI 2025
2025-05-06 - 2025-05-08
Nürnberg - Band
- Lectures
- Chapter
- D6 - Piezoelectric MEMS II
- Author(s)
- S. Zarepakzad, P. Egger, N. Haghighi, S. Muringakodan, M. Mortada, P. Das, U. Schmid, M. Schneider - TU Wien, Vienna (Austria), K. Schwab - Kavli Nanoscience Institute and Thomas J. Watson Sr., California (USA)
- Pages
- 222 - 223
- DOI
- 10.5162/SMSI2025/D6.2
- ISBN
- 978-3-910600-06-5
- Price
- free
Abstract
This study investigates noise mechanisms in piezoelectric MEMS membranes to identify and minimize performance limitations. A comprehensive noise model is developed, incorporating experimental measurements and the amplifier’s noise floor, validated through close agreement with measured noise spectra. The noise is decomposed into distinct sources, which are identified within the developed model. The findings provide valuable insights for optimizing MEMS membrane design, enhancing noise performance, and enabling high-precision applications in sensing and actuation.