D6.4 - Characterization of AlN-Based MEMS Kineto-Electric Transducer for Cultural Heritage Conservation
- Event
- SMSI 2025
2025-05-06 - 2025-05-08
Nürnberg - Band
- Lectures
- Chapter
- D6 - Piezoelectric MEMS II
- Author(s)
- C. Trigona, S. Ahmed, A. Gueli, S. Baglio - University of Catania, Catania (Italy), M. Liuzzo, F. Iacono, G. Navarra - University of Enna “Kore”, Enna (Italy)
- Pages
- 226 - 227
- DOI
- 10.5162/SMSI2025/D6.4
- ISBN
- 978-3-910600-06-5
- Price
- free
Abstract
In this study, an Aluminum Nitride (AlN) MEMS device is analyzed and characterized for kineto-electric conversion. The device has been designed, fabricated, and tested with the primary goal of being employed in the field of preventive conservation and conservation of cultural heritage. For this purpose, the system is capable of detecting low-frequency vibrations of weak intensity and has the ability to generate voltage, enabling kineto-electric conversion without relying on batteries. This feature significantly reduces the overall power consumption of the entire sensing system.