D6.3 - DC Voltage Induced Parametric Potential Energy Modulation in Bistable Piezoelectric MEMS Membranes
- Event
- SMSI 2025
2025-05-06 - 2025-05-08
Nürnberg - Band
- Lectures
- Chapter
- D6 - Piezoelectric MEMS II
- Author(s)
- S. Muringakodan, U. Schmid, M. Schneider - TU Wien, Vienna (Austria)
- Pages
- 224 - 225
- DOI
- 10.5162/SMSI2025/D6.3
- ISBN
- 978-3-910600-06-5
- Price
- free
Abstract
This paper explores the potential energy modulation of bistable PiezoMEMS membranes via stress tun-ing. The static deflection of the membrane is tuned by applying DC voltage, while external air pressure enables load-deflection measurements for the potential energy analysis. The effect of DC on the mem-brane is closely related to the membrane's stress and its initial static buckling height. Membranes that are already buckled and exhibit bistability demonstrate minimal changes when subjected to DC. In con-trast, membranes that are buckled but remain monostable exhibit a significant response to DC.